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method for producing a performance -enhanced multi-gate transistor and manufactured by a multi-gate transistor
method for producing a performance -enhanced multi-gate transistor and manufactured by a multi-gate transistor
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机译:增强性能的多栅晶体管的制造方法,以及由多栅晶体管制造的方法
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摘要
method can improve the performance of multi- gate transistor is provided. After preparation of the multi-gate transistor is the formation of the active pattern comprises a multi-channel region to be formed on the second surface over the channel , to form a local region and the connection wires to other multi-channel active regions of the active pattern of the multi-gate transistor to complete the structure . The multi-gate made by the method of the present invention also provides a transistor .
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