Process for the preparation of chalcogenide layers by chemical reaction of layers of metals or metal compounds in the low-energy chalcogen ion beam

摘要

Chalcogenide layer production, by interaction of metal and metal compound layer systems with selenium or sulfur ions, is new. Chalcogenide layers are produced by interaction of metal and metal compound layer systems with selenium or sulfur ions of less than 1 keV energy, the ion beams providing all or part of the chalcogen quantity and thermal energy for complete reaction.