Mirror reflecting in the EUV spectral range

摘要

Mirror for the EUV spectral region comprises a layer arrangement having a number of partial layer systems (1, 2, 3) applied on a substrate (7). The partial layer systems have a sequence of individual layers of different materials forming periods (4). The number of periods and the thickness of the periods of the partial systems decreases from the substrate to the surface (8). Preferred Features: Three partial systems with periods of two individual layers of different materials are arranged on the substrate. The number of periods of each partial system is selected so that all partial systems have the same reflectivity of the mirror. The individual layers are made from molybdenum and silicon.