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Connection to the formation of a self-assembled monolayer, a layer structure, the semiconductor device with a layer structure and method for the production of a layer structure

机译:连接到自组装单层,层结构,具有层结构的半导体器件的形成方法以及层结构的制造方法

摘要

Embodiments of the invention provide a semiconductor component and a method of manufacture thereof. A semiconductor component comprises: a gate electrode layer adjacent a substrate, and a gate dielectric layer adjacent the gate electrode layer. The gate dielectric layer comprises a monolayer of at least one compound, wherein the compound has an aromatic or a condensed aromatic molecular group. The molecular group is capable of pi-pi interactions, which stabilize the monolayer. In an embodiment, the semiconductor component is an organic field effect transistor (OFET). In an embodiment of the invention, a method includes forming the monolayer using a liquid phase immersion process.
机译:本发明的实施例提供一种半导体部件及其制造方法。半导体部件包括:邻近基板的栅电极层,以及邻近栅电极层的栅介电层。栅极介电层包括至少一种化合物的单层,其中该化合物具有芳族或稠合的芳族分子基团。分子基团能够进行pi-pi相互作用,从而稳定单分子层。在一个实施例中,半导体组件是有机场效应晶体管(OFET)。在本发明的一个实施方案中,一种方法包括使用液相浸没工艺形成单层。

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