首页>
外国专利>
Production of an electronic component used in the production of integrated circuits comprises forming an insulating layer as a metal oxide layer by plasma-electrolytic oxidation of the metal
Production of an electronic component used in the production of integrated circuits comprises forming an insulating layer as a metal oxide layer by plasma-electrolytic oxidation of the metal
展开▼
机译:用于集成电路生产的电子部件的生产包括通过金属的等离子体电解氧化形成绝缘层作为金属氧化物层。
展开▼
页面导航
摘要
著录项
相似文献
摘要
Production of an electronic component comprises forming an insulating layer (3c) as a metal oxide layer by plasma-electrolytic oxidation of the metal. An independent claim is also included for an electronic component produced using the above process.
展开▼