Semiconductor sample testing method used in forming integrated circuits, involves scanning semiconductor sample for several times, computing cross-correlation between scannings to determine shift value, and overlaying and shifting scannings

摘要

The method involves scanning a semiconductor sample (207) for several times to measure the interesting size of the semiconductor sample. Cross-correlation between the scannings is computed. A respective shift value is determined for every scanning based on the computed cross-correlation. Overlaying of the scannings is then performed, in which the each scanning is shifted with the loading of the respective shift value. Independent claims are included for the following: (1) Test equipment; and (2) Test arrangement for semiconductor sample.