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process for the production of integrated chemical mikroreaktoren of semiconductor material, and integrated mikroreaktor
process for the production of integrated chemical mikroreaktoren of semiconductor material, and integrated mikroreaktor
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机译:半导体材料的集成化学mikroreaktoren的生产方法以及集成mikroreaktor
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摘要
The microreactor is completely integrated and is formed by a semiconductor body (2) having a surface (4) and housing at least one buried channel (3) accessible from the surface of the semiconductor body (2) through two trenches (21a, 21b). A heating element (10) extends above the surface (4) over the channel (3) and a resist region (18) extends above the heating element and defines an inlet reservoir and an outlet reservoir (19, 20). The reservoirs (19, 20) are connected to the trenches (21a, 21b) and have, in cross-section, a larger area than the trenches. The outlet reservoir (20) has a larger area than the inlet reservoir (19). A sensing electrode (12) extends above the surface (4) and inside the outlet reservoir (20). IMAGE
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