Pressure sensor for detecting fuel pressure in vehicle, has diaphragm inserted into recess portion in substrate, corresponding to area where strain gauges are formed so that substrate insulation layer is bonded to diaphragm

摘要

The strain gauges (24) separated by trenches (25) in a silicon-on-insulator (SOI) substrate (20), convert bending of a diaphragm (11) of a metal stem (10) into electrical signal. The diaphragm is inserted in a recess portion (28) formed in semiconductor layer (22) of the substrate, corresponding to area where gauges are formed so that insulation layer (23) of substrate is bonded to diaphragm surface.