LINEWIDTH MEASUREMENT REGULATION METHOD, AND SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a linewidth measurement regulation method and a scanning electron microscope capable of preventing a measured result from being fluctuated even when changing a magnification, a scanning direction and a measuring instrument.;SOLUTION: This linewidth measurement regulation method includes regulation for the second electron beam intensity distribution to make the first electron beam intensity distribution of an electron beam scanned in the first magnification equal to the second electron beam intensity distribution of an electron beam scanned in the second magnification. The second electron beam intensity distribution may be regulated by increasing or decreasing the second irradiation distance when preparing the electron beam intensity distribution.;COPYRIGHT: (C)2008,JPO&INPIT