STICKING METHOD OF OPTICAL DISK SUBSTRATE AND STICK APPARATUS FOR OPTICAL DISK SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a sticking method of optical disk substrates and a sticking apparatus of the optical disk substrates capable of preventing distortion of the surfaces of the optical disk substrates when two substrates are stuck to each other sandwiching an energy ray curing resin therebetween and the energy ray curing resin is cured by irradiation with an energy ray.;SOLUTION: The sticking apparatus 10 of the optical disk substrates is provided with a vacuum chamber 11 capable of housing a lower side substrate 34 and an upper side substrate 32 held to be parallel to each other and separated from each other, a vacuum suction device 14 for evacuating in the inner part of the vacuum chamber 11, a supporting table 37 for placing the lower side substrate 34 on a supporting surface 37a, a pressing member 13 pressing the upper side substrate 32 toward the supporting table 37, a device 29 for irradiation with the energy ray for irradiating the energy ray curing resin 33 with the energy ray and a separating means separating the lower side substrate 34 from the supporting table 37 before irradiation with the energy ray.;COPYRIGHT: (C)2007,JPO&INPIT