ULTRASONIC PROBE, ARRAY PROBE, AND METHOD OF MANUFACTURING ULTRASONIC PROBE

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic probe for furthermore improving the sensitivity by enhancing the linearity response of a displacement current with respect to a displacement of vibration and to provide an array probe and a method of manufacturing the ultrasonic probe.;SOLUTION: The ultrasonic probe 100 has a diaphragm structure provided with a substrate 101, a lower electrode 102 provided on the substrate 101, a spacer 106 provided to the surrounding of the lower electrode 102, and a membrane shaped upper electrode 107 stretched over an upper face of the spacer 106, and a protection membrane 108 provided to the surface of the upper electrode 107, and the lower electrode 102 is shaped along a curve drawn at the moment when the vibrated upper electrode 107 takes a most concaved shape.;COPYRIGHT: (C)2007,JPO&INPIT