ALIGNMENT ANGLE INSPECTION DEVICE OF PHOTOELECTRIC ENCODER

摘要

PROBLEM TO BE SOLVED: To evaluate alignment deviation in the rotation direction easily, quantitatively and highly accurately.;SOLUTION: This photoelectric encoder for detecting relative displacement between a scale 10 and a detection head 20 is provided with inspection lattices 42a, 42b having plus and minus angle offset θof to reference lattices 26, 12, and angle deviation between the lattices is detected based on a light receiving signal acquired by interaction between an inspection lattice and a reference lattice or a reference lattice for inspection disposed at the same angle as the reference lattice.;COPYRIGHT: (C)2007,JPO&INPIT