X-RAY MEASURING APPARATUS, X-RAY MEASURING METHOD AND X-RAY MEASURING PROGRAM

摘要

PPROBLEM TO BE SOLVED: To provide an X-ray measuring apparatus capable of obtaining an excellent panoramic images by having an X-ray source and a detector move on a simple circular trajectory, an X-ray measuring method and an X-ray measuring program. PSOLUTION: The X-ray source 3 and the detector 4 are held facing each other. A control processor 8 calculates a normal to the trajectory respectively for a plurality of points under consideration positioned on the trajectory of an object in a space set on an inspection object, calculates the position of the X-ray source 3 corresponding to the points under consideration on the basis of the calculated normal, sets the respective positions of the plurality of X-ray sources 3 on the trajectory near the position of the X-ray source 3 corresponding to the points under consideration, and for data acquired from the detector 4 when being at a position facing the set position of the X-ray source 3, acquires a tomographic image by extracting a prescribed part where the normal passes through from the data, and generates a first panoramic image by sticking the acquired tomographic images together on the basis of the positions of the points under consideration. PCOPYRIGHT: (C)2007,JPO&INPIT