Research on the measuring method of the slope error of EUV/X-ray optical elements and measuring apparatus of long trace profiler

摘要

The technology on the processing and detection of the extreme-ultraviolet radiation and X-ray (EUV/X-ray ) optical component is one of the main categories in modern short-wave band optical research. At present, EUV/X-ray optical component are in great demand on the construction of the rapidly developed synchrotron radiant lamp-house and beam of light engineering in developed countries. Now few countries has the ability of developing this kind of optical component with super-smooth surface and high precision and the key technology is processing and detecting technique. In this paper, the author study the measurement method and instrument of the EUV/X-ray optical component, improve the design of the measuring apparatus-long trace profiler LTP already existing, provide a kind of newly long traceprofiler LTP—III, which is used to measure slope error.