WAFER HOLDER FOR WAFER PROBER AND WAFER PROBER MOUNTED WITH SAME

摘要

PROBLEM TO BE SOLVED: To provide a high rigidity wafer holder for a wafer prober in which a temperature is lowered at the bottom of a support supporting a chuck top by enhancing a heat insulation effect, and a quick temperature rise and the cooling of a chip can be carried out while enhancing positional accuracy and soaking properties.;SOLUTION: The wafer holder 1 for the wafer prober comprises a chuck top 2 having a chuck top conductor layer 3 on the surface, and a support 4 for supporting the chuck top wherein an air gap exists between the chuck top and the support and a reflector 10 is provided in the air gap. The radiation rate of the surface of the reflector opposing the chuck top is preferably 0.5 or less.;COPYRIGHT: (C)2007,JPO&INPIT