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REFLECTION FILM FOR REFLECTION PLATE EXCELLENT IN CORROSION RESISTANCE AND SPUTTERING TARGET FOR FORMING REFLECTION FILM FOR REFLECTION PLATE EXCELLENT IN CORROSION RESISTANCE
REFLECTION FILM FOR REFLECTION PLATE EXCELLENT IN CORROSION RESISTANCE AND SPUTTERING TARGET FOR FORMING REFLECTION FILM FOR REFLECTION PLATE EXCELLENT IN CORROSION RESISTANCE
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机译:耐蚀性优异的反射板的反射膜和形成耐蚀性优异的反射板的溅射靶
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摘要
PROBLEM TO BE SOLVED: To provide a reflection layer for a reflection plate and a sputtering target for forming the reflection layer for the reflection plate.;SOLUTION: A reflection film for the reflection plate excellent in corrosion resistance is made of an aluminum alloy having specified composition where Mg content is 0.1 to 15 mass%, remainder is consisting of aluminum and inevitable impurities and the inevitable impurities is 100 ppm. Further the sputtering target for forming the reflection film for the reflection plate excellent in corrosion resistance is also provided.;COPYRIGHT: (C)2007,JPO&INPIT
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