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REFLECTIVE FILM FOR REFLECTIVE PLATE HAVING EXCELLENT CORROSION RESISTANCE, AND SPUTTERING TARGET FOR FORMING REFLECTIVE FILM FOR REFLECTIVE PLATE HAVING EXCELLENT CORROSION RESISTANCE
REFLECTIVE FILM FOR REFLECTIVE PLATE HAVING EXCELLENT CORROSION RESISTANCE, AND SPUTTERING TARGET FOR FORMING REFLECTIVE FILM FOR REFLECTIVE PLATE HAVING EXCELLENT CORROSION RESISTANCE
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机译:具有优异耐蚀性的反射板的反射膜,以及形成具有优异耐蚀性的反射板的反射膜的溅射靶
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摘要
PROBLEM TO BE SOLVED: To provide a reflective layer for a reflective plate, and to provide a sputtering target for forming the reflective layer for a reflective plate.;SOLUTION: The reflective film for a reflective plate having excellent corrosion resistance is composed of an aluminum alloy having a composition comprising, by mass, 0.1 to 15% Mg, and further comprising one or more kinds of rare earth elements by 0.1 to 5% in total, and the balance Al with inevitable impurities. The sputtering target is used for forming the reflective film for a reflective plate having excellent corrosion resistance.;COPYRIGHT: (C)2007,JPO&INPIT
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