METHOD, TOOL AND APPARATUS FOR MEASURING AMOUNT OF LIQUID DROPLET TO BE DISCHARGED, METHOD FOR ADJUSTING AMOUNT OF LIQUID DROPLET TO BE DISCHARGED, PLOTTING APPARATUS, DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To measure the amount of liquid droplets to be discharged from a liquid droplet discharge head at each of nozzles.;SOLUTION: The amount of liquid droplets of a liquid material 111 to be discharged from the liquid droplet discharge head 2 having a plurality of nozzles 25 is measured. The method for measuring the amount of liquid droplets to be discharged comprises: a packing step of discharging liquid droplets from each of the plurality of nozzles 25 and packing the discharged liquid droplets in a groove 32 arranged at each of the plurality of nozzles 25; and a measuring step of measuring the length of the liquid material 111 packed in the groove 32. The groove 32 has such a cross-sectional shape that the surface of the groove is made higher gradually as it goes from the center of the groove to both sides thereof. The amount of liquid droplets to be discharged from each of the plurality of nozzles 25 is estimated on the basis of a measured value of the length of the liquid material packed in the groove 32.;COPYRIGHT: (C)2007,JPO&INPIT