DROPS DISCHARGING-AMOUNT MEASURING METHOD, DROPS DISCHARGING-AMOUNT MEASURING TOOL, DROPS DISCHARGING-AMOUNT ADJUSTING METHOD, DROPS DISCHARGING-AMOUNT MEASURING APPARATUS, DRAWING APPARATUS, DEVICE, ELECTRO-OPTICAL APPARATUS AND ELECTRIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring, every nozzle, an amount of drops discharged from a drops discharging head.;SOLUTION: The drops discharging amount of the drops discharging head having a plurality of nozzles 25 for discharging a liquid material as drops is measured. That is, the method has a packing step for discharging drops from the nozzles 25 to be packed in a groove 32 arranged in each of a plurality of nozzles 25 and a measuring step for measuring the length when a liquid material is packed in the groove 32, wherein the packing step and the measuring step are repeated two or more times and the drops discharging amount of each nozzle 25 is estimated, from the length selected at the determined condition, from two or more values of the measured length.;COPYRIGHT: (C)2007,JPO&INPIT