LIQUID DROP MEASURING INSTRUMENT, LIQUID DROP MEASURING METHOD, LIQUID DROP APPLICATION DEVICE, DEVICE MANUFACTURING APPARATUS, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a liquid drop measuring instrument and a liquid drop measuring means capable of measuring quickly actual drops one drop by one drop, while simplifying constitution.;SOLUTION: This instrument/means includes a laser beams generating part 120 for generating a laser beams 130 in a flying route of the liquid drop 180, a photoelectric transfer part 150 for transferring an intensity of the laser beam 130 into an electric signal, and a signal processing part 160 for processing the electric signal. The signal processing part 160 stores a relational expression between the signal intensity of the photoelectric transfer part 150 when the liquid drop passes through the laser beam and a weight of the liquid drop, and calculates the weight of the liquid drop corresponding to the signal intensity input from the photoelectric transfer part 150, based on the relational expression.;COPYRIGHT: (C)2006,JPO&NCIPI