METHOD OF MEASURING AMOUNT OF DROPLET, METHOD OF MEASURING AMOUNT OF DROPLET DISCHARGED, IMPLEMENT FOR MEASUREMENT OF AMOUNT OF DROPLET, IMPLEMENT FOR MEASUREMENT OF AMOUNT DROPLET DISCHARGED, METHOD OF ADJUSTING AMOUNT OF DROPLET DISCHARGED, APPARATUS FOR MEASURING AMOUNT OF DROPLET DISCHARGED, DRAWING DEVICE, ELECTRO-OPTICAL APPARATUS AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of measuring the amount of droplets which can prevent variation of the amount of the spread of a liquid under the influence of the atmosphere surrounding the groove and improve the precision of the measurement of the amount of droplets discharged from the nozzle.;SOLUTION: The measuring method has a groove covering process of arranging a cover member 40 to cover a groove 32 over the groove 32 capable of storing droplets, with at least a part of the groove 32 exposed so that at least one droplet can impact on the part of the groove 32, a droplet spreading process of allowing droplets to impact on the part of the groove 32 and wet and spread over the part of the groove 32 covered with the cover member 40 and a measuring process of measuring the length of the droplets having wet and spread on the groove 32 and estimates the amount of droplets based on the measured values of the length of droplets.;COPYRIGHT: (C)2009,JPO&INPIT