METHOD FOR JOINING ANODE, METHOD FOR MANUFACTURING ELECTROSTATIC ACTUATOR, ELECTROSTATIC ACTUATOR, METHOD FOR MANUFACTURING DROPLET DELIVERY HEAD, DROPLET DELIVERY HEAD AND DROPLET DELIVERY APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an anode joining method which enables an excellent joining strength to be obtained by inhibiting the void at a joining interface in a short time without needing an apparatus modification or a jig fabrication to inhibit the void.;SOLUTION: The anode joining method includes a process of making a glass substrate 2a through which an atmospheric air communicating hole 16 is formed and a silicon substrate 1a wherein a groove 8 for discharging a bubble which communicates with the atmospheric air communicating hole 16 is formed along with a dicing line for formation of an individual chip stuck and piled up and a process of joining these substrates each other by applying a voltage to these substrates.;COPYRIGHT: (C)2007,JPO&INPIT