Being cracking manner of the radical numerator which irradiates cracking manner,

摘要

PROBLEM TO BE SOLVED: To obtain a cracking method of a nitrogen compound molecule with highly efficient and highly stable cracking characteristics by casting nitrogen compound molecule on a surface of a cracking material consisting of Al and decomposing the nitrogen compound molecule in a cracking material surface. ;SOLUTION: An open tube container body 1, a porous carrier 2 consisting of tubular Al sintering body impregnated with Al which is a cracking material and a heater 3 are provided. Al which is a cracking material is impregnated into the porous carrier 2 consisting of AlN sintering body and is heated to a desired temperature by the heater 3. Nitrogen compound raw gas is decomposed by an Al cracking material in a surface of the porous carrier 2, by making gaseous nitrogen compound raw gas pass through the tubular porous carrier 2 installed inside the open tube container body 1, and nitrogen radical is formed. Desirable temperature of an Al cracking material for obtaining high cracking efficiency by using Al as a cracking material is 400 to 800°C.;COPYRIGHT: (C)2000,JPO