DEFORMING METHOD FOR VARIATION MIRROR, ABERRATION COMPENSATION METHOD FOR OPTICAL DEVICE, AND ABERRATION COMPENSATION METHOD FOR FUNDUS OBSERVATION DEVICE

摘要

PPROBLEM TO BE SOLVED: To deform a variation mirror using a Zernike voltage template suitable for aberration correction by calibrating according to the use environment and production error of individual variation mirror. PSOLUTION: The deformation method for a variation mirror: having a reflecting face which induces distortion by an electrostatic voltage applied on a plurality of electrodes; detecting reflected light on the reflecting face; measuring supply voltages on the respective electrodes when the mirror has a desired reflecting face shape; preliminarily memorizing a predetermined number of groups of voltages corresponding to a predetermined number of reflecting face shapes, wherein one group representing supply voltages on the respective electrodes corresponding to one reference reflecting face shape; and superposing a group of the memorized electrodes and supply voltages so as to deform the mirror into a desired reflecting face shape. The variation mirror is deformed by comparing a memorized detection signal and an actually detected detection signal and correcting the memorized detection signal based on the use environment conditions such as humidity and production errors so as to obtain a desired detection signal. PCOPYRIGHT: (C)2007,JPO&INPIT