Being the hydrogen sensor which uses the magnesium thin film and the hydrogen sensor

摘要

PROBLEM TO BE SOLVED: To provide a hydrogen sensor using a magnesium thin film and a method for measuring the concentration of hydrogen.;SOLUTION: In a hydrogen sensor material using the magnesium thin film, the thickness of the magnesium thin film is 40 nm or less (1), a catalyst layer is formed in contact with the thin film (2), electric resistance and optical properties are changed in reaction with hydrogen at a room temperature (approximately 20°C) (3), and hydrogen is detected based on a change in the electric resistance and optical properties (4). The hydrogen sensor material having the above features, a method for measuring the concentration of hydrogen using the hydrogen sensor material, and a detection method for hydrogen are provided.;COPYRIGHT: (C)2004,JPO