Micro Hydrogen Sensor Based on Pd-Ag Nanofilm

摘要

In this paper,palladium-silver (Pd-Ag) system was studied for hydrogen sensing.Nanofilm of Pd-Ag was fabricated on a porous ceramic substrate through a combination of microfabrication techniques.The electric resistance of the zigzag-shaped microstructure was measured toward hydrogen concentration change.The sensing element demonstrates high sensitivity,fast response and fast recovery to hydrogen.The Pd-Ag film was characterized by scanning electron microscopy (SEM) equipped with X probe to correlate its physical and chemical properties to its sensing performance.The present sensor is very promising for room temperature hydrogen leakage detection and related applications.The temperature effect on the sensing performance of the metal film was also investigated.