Resonator and method of manufacturing the thin film bulk acoustic resonator using internal stress of the metal film

摘要

PROBLEM TO BE SOLVED: To simplify a manufacturing process and to improve a yield in a manufacturing method for a thin film bulk sound resonator.;SOLUTION: The manufacturing process includes a step (a) to laminate a sacrifice layer 110 on an upper face of a semiconductor substrate, a step (b) to eliminate the prescribed area of the sacrifice layer, a step (c) to vapor-deposit a metal film on the sacrifice layer and form a lower electrode layer 120 by conducting a patterning, a step (d) to vapor-deposit a piezoelectric substance on the upper face of the lower electrode layer and form a piezoelectric layer 130 by conducting the patterning, and a step (e) to vapor-deposit the metal film on an upper face of the piezoelectric layer and form an upper electrode layer 140 by conducting the patterning. At least one of either vapor deposition pressure or vapor deposition power is adjusted so as to generate a prescribed upward stress when the metal films for the upper and lower electrodes are vapor-deposited. The process to manufacture this is simplified because it does not require a supporting body.;COPYRIGHT: (C)2005,JPO&NCIPI