Being the yield rate forecasting device and the yield rate

摘要

PURPOSE: To provide a yield estimating device of semiconductor chips by which the estimation of the yield can be made at high speed without needing a massive memory area. ;CONSTITUTION: A particle forming part 12 forms noise particles to adhere to a plurality of semiconductor chips, and makes semiconductor chip identification numbers by the noise grains. An implanter 13 implants all the noise grains onto one mask stored in a circuit storage 15. A defect detector 16 examines whether the noise gains causes defects or not, by checking the mask pattern in the vicinity of the implanted noise grains. A semiconductor chip defect detector 17 detects the semiconductor chip which has caused the defect, based on the semiconductor chip identification number of each noise grain. And, an operating part 18 computers the yield of the semiconductor chip by the number of semiconductor chips which have not caused defects and the number of all semiconductor chips.;COPYRIGHT: (C)1996,JPO