Under existing of atmospheric pressure plasma generation manner and the atmospheric pressure

摘要

PROBLEM TO BE SOLVED: To generate atmospheric pressure plasma without existence of rare gas. SOLUTION: Electromagnetic waves are radiated to a metal or amphoteric element such as silicon, an alloy containing silicon, and intermetallic compound containing silicon in existence of at least one gas selected among rare gas, oxygen, nitrogen, hydrogen, and low grade hydrocarbon to form plasma of the gas. Obtained plasma gas may be put to get in contact with subject matter for plasma processing of the matter. In this case, the subject matter is metal alkoxide, for example, and the plasma gas is nitrogen, mixture of nitrogen with rare gas, or mixture of nitrogen and hydrogen with rare gas, so nitride carbide of metal is obtained.