ELECTRODE FOR ATMOSPHERIC PRESSURE PLASMA GENERATION, ATMOSPHERIC PRESSURE PLASMA GENERATING DEVICE, METHOD FOR MANUFACTURING SURFACE MODIFICATION BASE MATERIAL, AND METHOD FOR MANUFACTURING RECYCLED ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide an electrode for atmospheric pressure plasma generation, which makes possible to perform an efficient surface treatment on e.g. a large material having a large thickness in an atmospheric pressure plasma process.SOLUTION: An electrode 1 for atmospheric pressure plasma generation has a structure in which a metal layer 11 and a dielectric layer 12 are laminated. The dielectric layer 12 includes a dielectric of which the thermal expansion coefficient is 6.5×10/K or less at 40-400°C. In addition, an electrode 3a for atmospheric pressure plasma generation is used to perform a treatment on a base material, and it has a portion 32a which is located in a surface thereof and has a concave shape in section, and which can accommodate at least part of the base material.SELECTED DRAWING: Figure 2