Measuring method of conductivity of the conductive organicity numerator thin film and the structure null which possesses the conductive organicity numerator

摘要

PROBLEM TO BE SOLVED: To form a molecular thin film of organic silicon compound and to make its conductivity measurable by bringing a specific organic silicon compound into contact with a substrate with an insulation film where a hydroxyl group is formed on the surface and a pair of metal electrodes. ;SOLUTION: The conductive organic molecular thin film can be obtained by forming electrode patterns 21 and 22 on a substrate 10 and then bringing the solution or steam of the organic silicon compound being expressed, for example, by an expression (in the expression, X indicates an alkyl group or a silyl group, one of R1-R3 does a group for forming a covalent bond by reacting with a hydroxyl group, the rest does a group that does not react with the hydroxyl group, R4 does an alkyl group or the like, a and b are positive integers that are equal to 1 or larger). The substrate 10, for example, where a silicon oxide film is formed on the surface part of the silicon substrate is used. A molecular thin film 3 that is composed by an organic molecule 31 or the like and is self-organized is formed between the electrode patterns 21 and 22 due to the reaction between the hydroxyl group and the organic silicon compound being formed on the surface of the oxide film.;COPYRIGHT: (C)2000,JPO