Being true direct precision amendment manner of the measurement machine and true

摘要

PROBLEM TO BE SOLVED: To provide a correcting method for the straightness precision of a measuring instrument capable of solving the defect of the inversion method and capable of obtaining high-reliability measured data without improving an existing device. ;SOLUTION: This correcting method for the straightness precision of the measuring instrument 1 having linear motion mechanisms includes a straightness precision data calculating process in which a master work MW valued with shape data in advance in measured while a detector 7 is moved by the linear motion mechanism 4, 5 of the measuring instrument 1 and the valued shape data are subtracted from the master work measured data to obtain the straightness precision data of the linear motion mechanisms a work measured data calculating process in which a work is measured while the detector 7 is moved by the linear motion mechanisms of the measuring instrument 1 to obtain the work measured data, and a work shape arithmetic process in which the straightness precision data are subtracted from the work measured data to obtain the true value data of the work.;COPYRIGHT: (C)2001,JPO