Yttrium oxide composition, method of preparing the same, and method of forming yttrium oxide layer using the same

摘要

There are provided an yttrium oxide composition having particle size of 25 nm or less, a method of preparing the same and a method of forming an yttrium oxide layer using the same. The yttrium oxide composition is prepared by dissolving an yttrium salt into a solvent to prepare an yttrium salt solution, and adding a basic compound to the yttrium salt solution to adjust a pH value to a range of 3.7 to 7. The yttrium oxide composition can form an yttrium oxide layer having improved properties since the composition has particle size of 25 nm or less and uniform particle distribution.