Smart Thin-Film Coatings and Smart Polarization Devices, Smart Ellipsometric Memory, and Smart Ellipsometers

摘要

A closed-form formula is provided which is used to: 1) design thin-film coatings and transmission-polarization devices for polarization applications: determine the substrate optical constant, and the optical constant and thickness of a film-substrate system and the angle of incidence of operation to perform as a pre-specified optical polarization device at pre-specified conditions., 2) design transmission ellipsometric memory for CD, DVD, and other similar applications, 3) do real-time dynamic characterization of film-substrate systems by transmission ellipsometry using any ellipsometer to measure one or two pairs of the two ellipsometric angles psi and del at one or two angles of incidence and at only one wavelength to determine the optical constants of the film-substrate system and its film thickness, 4) develop computer programs and hardware implementation of items 1-3.