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Method for decreasing chemical diffusion in parylene and trapping at parylene-to-parylene interfaces
Method for decreasing chemical diffusion in parylene and trapping at parylene-to-parylene interfaces
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机译:减少聚对二甲苯中化学扩散并捕获在聚对二甲苯与聚对二甲苯界面中的方法
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摘要
Systems and methods for improving the adherence of poorly-adherent parylene-to-parylene films or layers and/or altering the water and chemical permeability of the parylene layers. A device having two or more parylene layers is heated in a reduced pressure treatment chamber at a temperature above the deposition temperature of the parylene (e.g., from about room temperature to several hundreds of degrees Celsius) for an extended period of time (e.g., a few hours up to several days). The methods of the present invention have been shown to convert poorly-adherent and/or water-permeable films to optimally-adherent and/or relatively water-impermeable films.
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