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Multi-layer film stack for extinction of substrate reflections during patterning
Multi-layer film stack for extinction of substrate reflections during patterning
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机译:多层膜叠层,可在构图过程中消除基板反射
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摘要
A method including introducing a dielectric layer over a substrate between an interconnection line and the substrate, the dielectric layer comprising a plurality of alternating material layers; and patterning an interconnection to the substrate. An apparatus comprising a substrate comprising a plurality of devices formed thereon; and an interlayer dielectric layer comprising a base layer and a cap layer, the cap layer comprising a plurality of alternating material layers overlying the substrate.
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