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Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same
Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same
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机译:具有优异的耐磨性,耐热性和对基材的粘附性的多层膜及其制造方法
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摘要
A multilayered film of the present invention includes a hard film provided on a substrate and including a compound of essential metal components, Al and Ti, with C, N, B, or O, and an intermediate layer formed between the substrate and the hard film, the intermediate layer including at least one selected from the group consisting of a metal, an alloy, and a compound of the metal or the alloy, and having an oxidation temperature lower than that of the hard film. The multilayered film further includes an oxide-containing layer formed by oxidizing the hard film, and an alumina film formed on the surface of the oxide-containing layer. The multilayered film of the present invention has excellent adhesion to the substrate, excellent heat resistance, and excellent oxidation resistance when being exposed to a substrate temperature of 700° C. or more and an oxidizing atmosphere.
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