Studies on Wear and Corrosion Resistances of Carbon Nitride Thin Films on Ti Alloy

摘要

CN x /SiCN composite films were prepared on titanium ( Ti ) alloy substrates by Radio Frequency Plasma Enhanced Chemical Vapor Deposition ( RF|PECVD ). As a buffer layer, SiCN ensured the adhesion of the CN x thin films on Ti substrates. X|ray diffraction ( XRD) measurement revealed that the composite films possessed α|C 3 N 4 structure. The microhardness of the films was 48 to 50 GPa. In order to test the characteristics of wear and corrosion resistances, we prepared Ti alloy samples with and without CN x /SiCN composite films. Also for strengthening the effect of wear and corrosion, the wear tests were carried out under high load (12 MPa) and in 0.9% NaCl solution. Results of the wear tests and the corrosive electrochemical measurements showed that the samples coated with CN x films had excellent characteristics of wear and corrosion resistances compared with Ti alloy substrate samples.