Position sensor, method for detecting horizontal and vertical position, alignment apparatus including position sensor, and method for horizontal and vertical alignment

摘要

A position sensor has an interface structure between negative dielectrics and a dielectric, and is provided with a configuration in which the plasmon intensity with respect to a microstructure in a surface including the interface structure or in the vicinity thereof is detected by the interface structure, and the positional relationship between the interface structure and the microstructure is thereby detected.