Micro-nanofluidic device fabrication, e.g. for dispensing medicine comprises depositing photo-curable resin on substrates, depositing of metallic-type components in capsule, sealing of obtained capsules, and cutting of device

摘要

A micro-nanofluidic device is fabricated by depositing photo-curable resin (5) from heat set polymer (3) on 2 substrates (1) (capsule 1 and capsule 2) of polymeric material (2); carrying out photolithography at low temperature to the layers of photo-curable resin; depositing metallic-type components (4) in the capsule; micro-structuring the deposited metallic components; depositing a layer of photo-curable resin from heat set polymer on capsule 1; carrying out photolithography; sealing the obtained capsules; and cutting the device.