METHOD FOR INSPECTING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, SEMICONDUCTOR INTEGRATED CIRCUIT, METHOD AND EQUIPMENT FOR TESTING SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

It is required to perform inspection for guaranteeing the quality of a semiconductor product at a place dedicated to inspection in order to perform a plurality of inspections, but since these inspection processes require enormous time, rate of inspection cost to unit price of a chip becomes high. At least any one of wafer carrying process, waiting process, assembling process, and carrying process of assembly is included from completion of diffusion of semiconductor products to shipment thereof, and inspection is performed while allocating a wafer state inspection process and a package state inspection process to any processes. Inspection equipment employing this inspection method comprises a means for recording inspection progress information when the inspection is completed during any process or inspection is interrupted during the process and performing the remaining inspection in the process by referring to the inspection progress information.