首页>
外国专利>
Method for failure analysis in the wafer fabrication
Method for failure analysis in the wafer fabrication
展开▼
机译:晶片制造中的失效分析方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Method for fault analysis in wafer fabrication has the following steps: (a) at least one wafer with a multiplicity of chips is provided (b) the chips are examined with respect to their properties (c) the results of the examination are transformed to a standard wafer with a predefined number of standard chips and (d) the transformed results are evaluated.
展开▼