DEVICE FOR RECORDING AN IMAGE OF AT LEAST ONE SURFACE OF A DISK-SHAPED OBJECT IN THE SEMICONDUCTOR INDUSTRY

摘要

The invention relates to a device for recording an image of at least one surface (2a, 2b) of a disk-shaped object (2) in the semiconductor industry. Said device comprises a camera (4), a scanning system (6), and a deviation system (8). The camera (4) and the disk-shaped object (2) are relatively arranged in relation to each other. The scanning system (6) is mounted in such a way that it can be moved at a first speed (V1) at least along the entire surface (2a, 2b) of the disk-shaped object (2). Likewise, the deviation system (8), which deviates the light from the scanning system (6) towards the camera (4), can be moved along the surface (2a, 2b) of the disk-shaped object (2) at a second speed (V2). The speeds are parallel and act in the same direction.