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METHOD FOR PRODUCING A SOLID BODY COMPRISING A MICROSTRUCTURE

机译:生产包含微结构的固体的方法

摘要

The invention relates to a method for producing a solid body (1) with a microstructure (2), according to which the surface of a substrate (3) is provided with a masking layer (6) that is impermeable to the substance to be applied. The substance is then applied to the areas of substrate that are not covered by the masking layer (6). The substance is then diffused into an area of the substrate that is covered by the masking layer (6) by means of a thermal treatment, in such a way that a concentration gradient of the substance is formed in the substrate area covered by the masking layer (6), said concentration decreasing from the edge of the masking layer (6) towards the interior. The masking layer (6) is subsequently removed to expose the substrate area lying below and a layer of the substrate (3) that lies close to the surface in the exposed substrate area is converted by means of a chemical conversion reaction into a coating (9), which has a layer thickness profile that corresponds to the concentration gradient of the substance contained in the layer that lies close to the surface. An additional treatment is carried out in a subsection of the coating (9), in which the thickness of said coating (9) is reduced.
机译:本发明涉及一种用于制造具有微结构(2)的固体(1)的方法,根据该方法,在基片(3)的表面上设置有对于所施加的物质而言不可渗透的掩模层(6)。 。然后将该物质施加到未被掩模层(6)覆盖的基板区域。然后,通过热处理将物质扩散到被掩模层(6)覆盖的衬底区域中,使得在被掩模层覆盖的衬底区域中形成物质的浓度梯度。 (6),所述浓度从掩模层(6)的边缘向内部减小。随后去除掩模层(6)以暴露位于下方的基底区域,并且通过化学转化反应将位于暴露的基底区域中靠近表面的基底(3)层转化为涂层(9)。 ),其层厚分布与靠近表面的层中所含物质的浓度梯度相对应。在涂层(9)的一个小部分中进行了另外的处理,其中所述涂层(9)的厚度减小了。

著录项

  • 公开/公告号EP1344245B1

    专利类型

  • 公开/公告日2007-03-14

    原文格式PDF

  • 申请/专利权人 MICRONAS GMBH;

    申请/专利号EP20000991238

  • 发明设计人 IGEL GUENTER;LEHMANN MIRKO;

    申请日2000-12-21

  • 分类号H01L21/033;H01L21/768;H01L21/60;H01L21/308;H01L21/336;

  • 国家 EP

  • 入库时间 2022-08-21 20:49:37

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