ELECTROSTATIC DRIVE TYPE MEMS MIRROR SCANNER

摘要

An object of the present invention is to provide an MEMS mirror scanner capable of achieving a scanning operation at a speed equivalent to or higher than a polygon mirror scanner and including a supporting structure for a flexible mirror, which can be driven even by drive force having a small electrostatic force. A scanning mirror is formed between a pair of suspension beams formed in a rod-like manner and arranged on the same straight line on a substrate and is oscillatably supported by using the straight line as an oscillation axis, and further, an electrostatic capacity drive unit is disposed along either side or both sides of the suspension beam. A maximum distance in an direction perpendicular to oscillation axis, that is, a direction of a width of the suspension beam from a center of an oscillation axis of the electrostatic capacity drive unit is, for example, 60% or less, more preferably, 40% or less of a maximum distance in an direction perpendicular to oscillation axis, that is, a direction of a length of the mirror from a center of an oscillation axis, that is, a rotational center of the mirror, thereby increasing a resonance frequency of the large scanning mirror.