THIN FILM INTERFERENCE FILTER AND BOOTSTRAP METHOD FOR INTERFERENCE FILTER THIN FILM DEPOSITION PROCESS CONTROL

摘要

A thin film interference filter system includes a plurality of stacked films having a determined reflectance; a modeled monitor curve; and a topmost layer configured to exhibit a wavelength corresponding to one of the determined reflectance or the modeled monitor curve. The topmost layer is placed on the plurality of stacked films and can be a low-index film such as silica or a high index film such as niobia.