VACUUM GAUGE CALIBRATION DEVICE FOR 1, 10, 100 TORR

摘要

A device for calibrating a vacuum gauge for 1, 10, and 100 torr is provided to increase repeatability by detecting a hysteresis by applying the same pressure under the same condition repeatedly. In a device for calibrating a vacuum gauge for 1, 10, and 100 torr, a counter weight supporting axis(134) is vertically installed inside of a pressure vessel(120). A plurality of counter weight supporting rods(138) is formed along an axis line at a predetermined interval and a pair of standard pressure gauges(140,142) is connected to a bottom of the counter weight supporting axis. A plurality of counter weight sets is installed between the counter weight supporting rods. An elevating device individually elevates each counter weight from the counter weight supporting rods or supports each counter on the counter weight supporting rods. And, a control unit controls an operation of the elevating device according to an external command.