Vacuum gauge calibration device for 1, 10, 100 torr

摘要

The present invention relates to 1 Torr, 10 Torr, 100 Torr combination vacuum gauge calibration device. To this end, internal standard pressure gauge (140, 142) in the pressure vessel (120) is installed in the vacuum gauge calibration device for calibrating the monitor, a pressure gauge 560 for, being perpendicular to the interior of the pressure vessel (120) a plurality of weight holder 138 are formed at predetermined intervals along the axis, the lower weight in the standard pressure gauge (140, 142) connected through shaft 134; Each weight between the cradle 138 is provided, plural sets of a plurality of weights constituting the weight set; Elevating means for so as to mount a plurality of the respective weights constituting the weight set in the weight holder 138 individually weight cut off or enters the cradle 138 from; And in accordance with the external command it is provided a control means for controlling the operation of the lifting means. ; Vacuum, pressure, gauge, weight, Thor, lifting, step motors, shaft mounted, the cradle