SEALING STRUCTURE OF PIPE SUPPLIES MONOMER IN APPARATUS FOR COATING WITH PARYLENE

摘要

The present invention relates to a parallel-Lin coating, in particular insert the end portion of the monomer supply line to the flange and the connector body The state pressed by the ring nut in, being screw, the monomer is supplied with a simple construction of fully coated device to block the leakage Lynn Farrell Farrell Lynn relates to the monomer supply line closed structure. ; The present invention Lynn Farrell is vaporized by the vaporizing unit configured to generate a dimeric powder dimer on the gas; Thermal cracking unit for generating the parallel-lean pyrolysis monomers to dimers by a heat transfer coil installed on the inside of the gas pipe; And the parallel-lean monomer vertically supply to bypass the baffle provided on the inner wall of the deposition chamber as long as the polymer is deposited on the base material phase state disposed in the jig in the deposition chamber is composed of a deposition to form a parallel Lin polymer; As being provided on one side of the pyrolysis section, the end of the monomer feed pipe connected to the evaporation pipe portion is inserted into the stepped doedoe and connection tube body of the receptor, the receptor comprises a body tube that has a stepped portion that is cut along the inner circumferential surface of the pipe end and As the end of the body and extended to the outside slope extend in the longitudinal direction is made of a number of threads, the flange being formed along the elongated end portion outer peripheral surface, wherein the connector body is a ring shape in close contact with the inner surface of the tube flange receptor along the outer peripheral edge perpendicular to the outer flange is bent; One end coupled with the inner peripheral surface of the acid number of the female screw thread along the flange to form a ring nut which is projected along a periphery portion perpendicular to the other end doedoe provided within the vertical projection of a ring nut for pressing a vertical bending of the connecting body closely with state and; The tube receptor, the part that connects body and pipe / branch all contact interposed O-ring.