MEMS ARRAY, MANUFACTURING METHOD THEREOF, AND MEMS DEVICE MANUFACTURING METHOD BASED ON THE SAME

摘要

for example resistor 10 , capacitor 20 , coil 30 and each of the plurality of devices , such as and integrated on a switch for connecting the device ( 41 to 44 ), the substrate (S), to form the MEMS array to enable connection of each element at random . Switches 41 to 44 may use a transistor switch or a mechanical switch . Can be replaced by on-off by the wiring of the on / off to manufacture the MEMS switch of the MEMS device of the array ( 41) to ( 44).